2023
3.
Fangzhou Xia*; Kamal Youcef-Toumi; Thomas Sattel; Eberhard Manske; Ivo W. Rangelow
Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection Journal Article
In: Journal of Visualized Experiments, pp. e65210, 2023, ISSN: 1940-087X.
Abstract | Links | BibTeX | Tags: Atomic Force Microscopy, Automation, Experimentation, Instrumentation, Material Science, Mechatronics, MEMS, Method, Sensor
@article{2023JoVE,
title = {Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection},
author = {Fangzhou Xia* and Kamal Youcef-Toumi and Thomas Sattel and Eberhard Manske and Ivo W. Rangelow},
url = {https://www.jove.com/t/65210},
doi = {10.3791/65210},
issn = {1940-087X},
year = {2023},
date = {2023-06-16},
urldate = {2023-06-16},
journal = {Journal of Visualized Experiments},
pages = {e65210},
abstract = {An Atomic Force Microscope (AFM) is a powerful and versatile tool for nanoscale surface studies to capture 3D topography images of samples. However, due to their limited imaging throughput, AFMs have not been widely adopted for large-scale inspection purposes. Researchers have developed high-speed AFM systems to record dynamic process videos in chemical and biological reactions at tens of frames per second, at the cost of a small imaging area of up to several square micrometers. In contrast, inspecting large-scale nanofabricated structures, such as semiconductor wafers, requires nanoscale spatial resolution imaging of a static sample over hundreds of square centimeters with high productivity. Conventional AFMs use a single passive cantilever probe with an optical beam deflection system, which can only collect one pixel at a time during AFM imaging, resulting in low imaging throughput. This work utilizes an array of active cantilevers with embedded piezoresistive sensors and thermomechanical actuators, which allows simultaneous multi-cantilever operation in parallel operation for increased imaging throughput. When combined with large-range nano-positioners and proper control algorithms, each cantilever can be individually controlled to capture multiple AFM images. With data-driven post-processing algorithms, the images can be stitched together, and defect detection can be performed by comparing them to the desired geometry. This paper introduces principles of the custom AFM using the active cantilever arrays, followed by a discussion on practical experiment considerations for inspection applications. Selected example images of silicon calibration grating, highly-oriented pyrolytic graphite, and extreme ultraviolet lithography masks are captured using an array of four active cantilevers ("Quattro") with a 125 {textmu}m tip separation distance. With more engineering integration, this high-throughput, large-scale imaging tool can provide 3D metrological data for extreme ultraviolet (EUV) masks, chemical mechanical planarization (CMP) inspection, failure analysis, displays, thin-film step measurements, roughness measurement dies, and laser-engraved dry gas seal grooves.},
keywords = {Atomic Force Microscopy, Automation, Experimentation, Instrumentation, Material Science, Mechatronics, MEMS, Method, Sensor},
pubstate = {published},
tppubtype = {article}
}
An Atomic Force Microscope (AFM) is a powerful and versatile tool for nanoscale surface studies to capture 3D topography images of samples. However, due to their limited imaging throughput, AFMs have not been widely adopted for large-scale inspection purposes. Researchers have developed high-speed AFM systems to record dynamic process videos in chemical and biological reactions at tens of frames per second, at the cost of a small imaging area of up to several square micrometers. In contrast, inspecting large-scale nanofabricated structures, such as semiconductor wafers, requires nanoscale spatial resolution imaging of a static sample over hundreds of square centimeters with high productivity. Conventional AFMs use a single passive cantilever probe with an optical beam deflection system, which can only collect one pixel at a time during AFM imaging, resulting in low imaging throughput. This work utilizes an array of active cantilevers with embedded piezoresistive sensors and thermomechanical actuators, which allows simultaneous multi-cantilever operation in parallel operation for increased imaging throughput. When combined with large-range nano-positioners and proper control algorithms, each cantilever can be individually controlled to capture multiple AFM images. With data-driven post-processing algorithms, the images can be stitched together, and defect detection can be performed by comparing them to the desired geometry. This paper introduces principles of the custom AFM using the active cantilever arrays, followed by a discussion on practical experiment considerations for inspection applications. Selected example images of silicon calibration grating, highly-oriented pyrolytic graphite, and extreme ultraviolet lithography masks are captured using an array of four active cantilevers ("Quattro") with a 125 {textmu}m tip separation distance. With more engineering integration, this high-throughput, large-scale imaging tool can provide 3D metrological data for extreme ultraviolet (EUV) masks, chemical mechanical planarization (CMP) inspection, failure analysis, displays, thin-film step measurements, roughness measurement dies, and laser-engraved dry gas seal grooves.
2022
2.
Fangzhou Xia*; Morgan P Mayborne; Qiong Ma; Kamal Youcef-Toumi
Physical Intelligence in the Metaverse: Mixed Reality Scale Models for Twistronics and Atomic Force Microscopy Proceedings Article
In: 2022 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 1722-1729, 2022.
Abstract | Links | BibTeX | Tags: Actuator, Atomic Force Microscopy, Design, Education, Experimentation, Instrumentation, Intelligence, Material Science, Mechatronics, MEMS, Modeling & Simulation, Nanorobotics, Sensor
@inproceedings{2022IEEEAIM,
title = {Physical Intelligence in the Metaverse: Mixed Reality Scale Models for Twistronics and Atomic Force Microscopy},
author = {Fangzhou Xia* and Morgan P Mayborne and Qiong Ma and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/document/9863383},
doi = {10.1109/AIM52237.2022.9863383},
year = {2022},
date = {2022-01-01},
urldate = {2022-01-01},
booktitle = {2022 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)},
pages = {1722-1729},
abstract = {Physical intelligence (PI) is an emerging research field using new multi-functional smart materials in mechatronic designs. On the microscopic scale, PI principles give rise to unconventional transducers, which are especially useful for micro/nano-robot design with size and resource constrains. Since it is not easy to directly observe nanoscale multi-physics phenomenon, understanding their principles can be challenging. In this work, we bring PI principles into the metaverse to bridge this gap by developing two mixed reality scale models. The first example is a virtual reality (VR) 2D material twistronics visualizer to demonstrate the novel intelligent 2D materials with tunable properties as a rising field in condensed matter physics. Users can interactively control the cross-coupling multi-physics phenomena and observe the visualized material responses. The second example is centered around an Atomic Force Microscope (AFM) to illustrate its imaging and probe principles. For interaction, users can control the twist angle using atomic lattice models and feel the AFM cantilever force using custom haptic devices. We believe these tools can help precision mechatronic engineers understand and make better use of physical intelligence building blocks to design micro-electromechanical systems.},
keywords = {Actuator, Atomic Force Microscopy, Design, Education, Experimentation, Instrumentation, Intelligence, Material Science, Mechatronics, MEMS, Modeling & Simulation, Nanorobotics, Sensor},
pubstate = {published},
tppubtype = {inproceedings}
}
Physical intelligence (PI) is an emerging research field using new multi-functional smart materials in mechatronic designs. On the microscopic scale, PI principles give rise to unconventional transducers, which are especially useful for micro/nano-robot design with size and resource constrains. Since it is not easy to directly observe nanoscale multi-physics phenomenon, understanding their principles can be challenging. In this work, we bring PI principles into the metaverse to bridge this gap by developing two mixed reality scale models. The first example is a virtual reality (VR) 2D material twistronics visualizer to demonstrate the novel intelligent 2D materials with tunable properties as a rising field in condensed matter physics. Users can interactively control the cross-coupling multi-physics phenomena and observe the visualized material responses. The second example is centered around an Atomic Force Microscope (AFM) to illustrate its imaging and probe principles. For interaction, users can control the twist angle using atomic lattice models and feel the AFM cantilever force using custom haptic devices. We believe these tools can help precision mechatronic engineers understand and make better use of physical intelligence building blocks to design micro-electromechanical systems.
2019
1.
Fangzhou Xia*; Chen Yang; Yi Wang; Kamal Youcef-Toumi; Christoph Reuter; Tzvetan Ivanov; Mathias Holz; Ivo W Rangelow
Lights Out! Nano-Scale Topography Imaging of Sample Surface in Opaque Liquid Environments with Coated Active Cantilever Probes Journal Article
In: Nanomaterials, vol. 9, no. 7, pp. 1013, 2019.
Abstract | Links | BibTeX | Tags: Atomic Force Microscopy, Experimentation, Instrumentation, Material Science, Mechatronics, MEMS, Nanorobotics, Sensor
@article{2019NM,
title = {Lights Out! Nano-Scale Topography Imaging of Sample Surface in Opaque Liquid Environments with Coated Active Cantilever Probes},
author = {Fangzhou Xia* and Chen Yang and Yi Wang and Kamal Youcef-Toumi and Christoph Reuter and Tzvetan Ivanov and Mathias Holz and Ivo W Rangelow},
url = {https://www.mdpi.com/2079-4991/9/7/1013},
year = {2019},
date = {2019-01-01},
urldate = {2019-01-01},
journal = {Nanomaterials},
volume = {9},
number = {7},
pages = {1013},
publisher = {Multidisciplinary Digital Publishing Institute},
abstract = {Atomic force microscopy is a powerful topography imaging method used widely in nanoscale metrology and manipulation. A conventional Atomic Force Microscope (AFM) utilizes an optical lever system typically composed of a laser source, lenses and a four quadrant photodetector to amplify and measure the deflection of the cantilever probe. This optical method for deflection sensing limits the capability of AFM to obtaining images in transparent environments only. In addition, tapping mode imaging in liquid environments with transparent sample chamber can be difficult for laser-probe alignment due to multiple different refraction indices of materials. Spurious structure resonance can be excited from piezo actuator excitation. Photothermal actuation resolves the resonance confusion but makes optical setup more complicated. In this paper, we present the design and fabrication method of coated active scanning probes with piezoresistive deflection sensing, thermomechanical actuation and thin photoresist polymer surface coating. The newly developed probes are capable of conducting topography imaging in opaque liquids without the need of an optical system. The selected coating can withstand harsh chemical environments with high acidity (e.g., 35% sulfuric acid). The probes are operated in various opaque liquid environments with a custom designed AFM system to demonstrate the imaging performance. The development of coated active probes opens up possibilities for observing samples in their native environments.},
keywords = {Atomic Force Microscopy, Experimentation, Instrumentation, Material Science, Mechatronics, MEMS, Nanorobotics, Sensor},
pubstate = {published},
tppubtype = {article}
}
Atomic force microscopy is a powerful topography imaging method used widely in nanoscale metrology and manipulation. A conventional Atomic Force Microscope (AFM) utilizes an optical lever system typically composed of a laser source, lenses and a four quadrant photodetector to amplify and measure the deflection of the cantilever probe. This optical method for deflection sensing limits the capability of AFM to obtaining images in transparent environments only. In addition, tapping mode imaging in liquid environments with transparent sample chamber can be difficult for laser-probe alignment due to multiple different refraction indices of materials. Spurious structure resonance can be excited from piezo actuator excitation. Photothermal actuation resolves the resonance confusion but makes optical setup more complicated. In this paper, we present the design and fabrication method of coated active scanning probes with piezoresistive deflection sensing, thermomechanical actuation and thin photoresist polymer surface coating. The newly developed probes are capable of conducting topography imaging in opaque liquids without the need of an optical system. The selected coating can withstand harsh chemical environments with high acidity (e.g., 35% sulfuric acid). The probes are operated in various opaque liquid environments with a custom designed AFM system to demonstrate the imaging performance. The development of coated active probes opens up possibilities for observing samples in their native environments.
Dr. Fangzhou Xia
Research Scientist
Mechanical Engineering Department
Physics Department
Massachusetts Institute of Technology