2024
10.
Fangzhou Xia*; Ivo W Rangelow; Kamal Youcef-Toumi
Active Probe Atomic Force Microscopy: A Practical Guide on Precision Instrumentation Book
Springer, 2024, ISBN: 978-3-031-44232-2.
Abstract | Links | BibTeX | Tags: Actuator, Atomic Force Microscopy, Design, Education, Experimentation, Instrumentation, Mechatronics, MEMS, Modeling & Simulation, Motion Control, Nanorobotics, Piezoelectricity, Review, Sensor, Signal Processing, Theory
@book{2023AFMbook,
title = {Active Probe Atomic Force Microscopy: A Practical Guide on Precision Instrumentation},
author = {Fangzhou Xia* and Ivo W Rangelow and Kamal Youcef-Toumi},
url = {https://link.springer.com/book/10.1007/978-3-031-44233-9},
doi = {https://doi.org/10.1007/978-3-031-44233-9},
isbn = {978-3-031-44232-2},
year = {2024},
date = {2024-02-06},
urldate = {2023-10-01},
publisher = {Springer},
abstract = {From a perspective of precision instrumentation, this book provides a guided tour to readers on exploring the inner workings of atomic force microscopy (AFM). Centered around AFM, a broad range of mechatronic system topics are covered including mechanics, sensors, actuators, transmission design, system identification, signal processing, dynamic system modeling, controller. With a solid theoretical foundation, practical examples are provided for AFM subsystem level design on nano-positioning system, cantilever probe, control system and system integration. This book emphasizes novel development of active cantilever probes with embedded transducers, which enables new AFM capabilities for advanced applications. Full design details of a low-cost educational AFM and a Scale Model Interactive Learning Extended Reality (SMILER) toolkit are provided, which helps instructors to make use of this book for curriculum development. This book aims to empower AFM users with deeper understanding of the instrument to extend AFM functionalities for advanced state-of-the-art research studies. Going beyond AFM, materials presented in this book are widely applicable to precision mechatronic system design covered in many upper-level graduate courses in mechanical and electrical engineering to cultivate next generation instrumentalists.},
keywords = {Actuator, Atomic Force Microscopy, Design, Education, Experimentation, Instrumentation, Mechatronics, MEMS, Modeling & Simulation, Motion Control, Nanorobotics, Piezoelectricity, Review, Sensor, Signal Processing, Theory},
pubstate = {published},
tppubtype = {book}
}
From a perspective of precision instrumentation, this book provides a guided tour to readers on exploring the inner workings of atomic force microscopy (AFM). Centered around AFM, a broad range of mechatronic system topics are covered including mechanics, sensors, actuators, transmission design, system identification, signal processing, dynamic system modeling, controller. With a solid theoretical foundation, practical examples are provided for AFM subsystem level design on nano-positioning system, cantilever probe, control system and system integration. This book emphasizes novel development of active cantilever probes with embedded transducers, which enables new AFM capabilities for advanced applications. Full design details of a low-cost educational AFM and a Scale Model Interactive Learning Extended Reality (SMILER) toolkit are provided, which helps instructors to make use of this book for curriculum development. This book aims to empower AFM users with deeper understanding of the instrument to extend AFM functionalities for advanced state-of-the-art research studies. Going beyond AFM, materials presented in this book are widely applicable to precision mechatronic system design covered in many upper-level graduate courses in mechanical and electrical engineering to cultivate next generation instrumentalists.
2023
9.
Jiajie Qiu^; Hongjin Kim^; Fangzhou Xia*; Kamal Youcef-Toumi
Multi-axis Active Vibration Suppression for Wafer Transfer Systems Best Paper Proceedings Article
In: IEEE/ASME Advanced Intelligent Mechatronics, 2023.
Abstract | Links | BibTeX | Tags: Actuator, Automation, Design, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Theory
@inproceedings{2023AIM,
title = {Multi-axis Active Vibration Suppression for Wafer Transfer Systems},
author = {Jiajie Qiu^ and Hongjin Kim^ and Fangzhou Xia* and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/document/10196218},
year = {2023},
date = {2023-06-27},
urldate = {2023-06-27},
booktitle = {IEEE/ASME Advanced Intelligent Mechatronics},
abstract = {Vibration suppression is critical in precision mechatronic systems for nanofabrication. For automated wafer handling in semiconductor plants, Overhead Hoist Transport (OHT) vehicles transport wafers carried in Front Opening Unified Pods (FOUPs); while the wafers are transported in a FOUP, semiconductor chips are at risk of damage by excited small particles due to mechanical vibration. Active suppression of the FOUP vibrations has been proposed to improve the production yield. However, there are two main challenges that make it a non-trivial problem. First, moving FOUPs carried by the OHT vehicles have no external anchoring point as a momentum source for control efforts. Second, no sensor attachment is permitted on mass-production FOUPs, which makes feedback control more challenging without measurement. Since the goal is to suppress the large FOUP acceleration peaks instead of eliminating all vibration, an inertia-based counterbalancing system is designed to address these challenges. To validate this idea, a custom testbed is designed for multi-axis vibration generation and suppression. A Disturbance Observer-Based Controller (DOBC) is developed and implemented on the hardware. During the experiment, 38 percent of the OHT hand unit vibration (and 42 percent of FOUP vibration) suppression is achieved in the OHT travel direction. Moreover, multi-axis FOUP-level acceleration-peak reduction is achieved to verify the effectiveness of the proposed method. },
keywords = {Actuator, Automation, Design, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Theory},
pubstate = {published},
tppubtype = {inproceedings}
}
Vibration suppression is critical in precision mechatronic systems for nanofabrication. For automated wafer handling in semiconductor plants, Overhead Hoist Transport (OHT) vehicles transport wafers carried in Front Opening Unified Pods (FOUPs); while the wafers are transported in a FOUP, semiconductor chips are at risk of damage by excited small particles due to mechanical vibration. Active suppression of the FOUP vibrations has been proposed to improve the production yield. However, there are two main challenges that make it a non-trivial problem. First, moving FOUPs carried by the OHT vehicles have no external anchoring point as a momentum source for control efforts. Second, no sensor attachment is permitted on mass-production FOUPs, which makes feedback control more challenging without measurement. Since the goal is to suppress the large FOUP acceleration peaks instead of eliminating all vibration, an inertia-based counterbalancing system is designed to address these challenges. To validate this idea, a custom testbed is designed for multi-axis vibration generation and suppression. A Disturbance Observer-Based Controller (DOBC) is developed and implemented on the hardware. During the experiment, 38 percent of the OHT hand unit vibration (and 42 percent of FOUP vibration) suppression is achieved in the OHT travel direction. Moreover, multi-axis FOUP-level acceleration-peak reduction is achieved to verify the effectiveness of the proposed method.
8.
Yip Fun Yeung*; Fangzhou Xia; Juliana Covarrubias; Mikio Furokawa; Takayuki Hirano; Kamal Youcef-Toumi
Robotic Method and Instrument to Efficiently Synthesize Faulty Conditions and Mass-Produce Faulty-Conditioned Data for Rotary Machines Proceedings Article
In: IEEE International Conference on Robotics and Automation (ICRA), 2023.
Abstract | Links | BibTeX | Tags: Actuator, Automation, Design, Experimentation, Instrumentation, Intelligence, Mechatronics, Motion Control, Theory
@inproceedings{2023ICRA,
title = {Robotic Method and Instrument to Efficiently Synthesize Faulty Conditions and Mass-Produce Faulty-Conditioned Data for Rotary Machines},
author = {Yip Fun Yeung* and Fangzhou Xia and Juliana Covarrubias and Mikio Furokawa and Takayuki Hirano and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/document/10161055},
year = {2023},
date = {2023-05-29},
urldate = {2023-05-29},
booktitle = {IEEE International Conference on Robotics and Automation (ICRA)},
abstract = {Condition synthesis is vital for generating data for fault detection and diagnosis studies. Traditional methods rely heavily on human labor. This study proposes a robotic method and its instrument to efficiently synthesize faulty conditions and mass-produce data to develop fault detection and diagnosis algorithms. The first contribution is the formalization of a new approach called Robotic Condition Synthesis, which shifts the traditionally labor-intensive task of condition synthesis to a robot-based force control task. The second contribution is developing a new robotic manipulator, which is more effective than current lab-grade robots for the tasks involved in the Robotic Condition Synthesis. The third contribution is empirical evidence of the superiority of this new robot in performing the Robotic Condition Synthesis tasks. This study also explores the potential of the new robot by conducting a three-dimensional system identification of a rotordynamic plant, which lays the foundation for more advanced Robotic Condition Synthesis policies in the future.},
keywords = {Actuator, Automation, Design, Experimentation, Instrumentation, Intelligence, Mechatronics, Motion Control, Theory},
pubstate = {published},
tppubtype = {inproceedings}
}
Condition synthesis is vital for generating data for fault detection and diagnosis studies. Traditional methods rely heavily on human labor. This study proposes a robotic method and its instrument to efficiently synthesize faulty conditions and mass-produce data to develop fault detection and diagnosis algorithms. The first contribution is the formalization of a new approach called Robotic Condition Synthesis, which shifts the traditionally labor-intensive task of condition synthesis to a robot-based force control task. The second contribution is developing a new robotic manipulator, which is more effective than current lab-grade robots for the tasks involved in the Robotic Condition Synthesis. The third contribution is empirical evidence of the superiority of this new robot in performing the Robotic Condition Synthesis tasks. This study also explores the potential of the new robot by conducting a three-dimensional system identification of a rotordynamic plant, which lays the foundation for more advanced Robotic Condition Synthesis policies in the future.
7.
Jiajie Qiu^; Hongjin Kim^; Fangzhou Xia*; Kamal Youcef-Toumi
Disturbance Rejection Control for Active Vibration Suppression of OHT Wafer Transfer Vehicles Journal Article
In: Machines, vol. 11, no. 2, pp. 125, 2023.
Abstract | Links | BibTeX | Tags: Actuator, Automation, Design, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Theory
@article{2023Machines,
title = {Disturbance Rejection Control for Active Vibration Suppression of OHT Wafer Transfer Vehicles},
author = {Jiajie Qiu^ and Hongjin Kim^ and Fangzhou Xia* and Kamal Youcef-Toumi},
url = {https://www.mdpi.com/2075-1702/11/2/125},
doi = {10.3390/machines11020125},
year = {2023},
date = {2023-01-01},
urldate = {2023-01-01},
journal = {Machines},
volume = {11},
number = {2},
pages = {125},
abstract = {In modern semiconductor fabrication plants, automated Overhead Hoist Transport (OHT) vehicles transport wafers in Front Opening Unified Pods (FOUPs). Even in a cleanroom environment, small particles excited by the mechanical vibration of the FOUP can still damage the chips if such particles land on the critical area of the wafers. To minimize the vibration excitation force transferred to the FOUP, this research focuses on controlling the vibration displacement level of an OHT Hand Unit—interface between the OHT vehicle and the FOUP. However, since the OHT vehicle and the FOUP keep traveling, the target system is floating and there exists no external anchoring point for a controlling force source. In addition, no sensor attachments are permitted on mass-production FOUPs, which makes this vibration level suppression problem more challenging. In this research, a custom testbed is designed to replicate the acceleration profile of the OHT vehicle under its travel motion. Then, system modeling and identification is conducted using simulation and experiment to verify the fabricated testbed design. Finally, a Disturbance Observer-Based Controller (DOBC) is developed and implemented on a custom active vibration suppression actuator with inertia force-based counterbalancing to reduce peak vibration amplitude from 870 µm to 230 µm.},
keywords = {Actuator, Automation, Design, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Theory},
pubstate = {published},
tppubtype = {article}
}
In modern semiconductor fabrication plants, automated Overhead Hoist Transport (OHT) vehicles transport wafers in Front Opening Unified Pods (FOUPs). Even in a cleanroom environment, small particles excited by the mechanical vibration of the FOUP can still damage the chips if such particles land on the critical area of the wafers. To minimize the vibration excitation force transferred to the FOUP, this research focuses on controlling the vibration displacement level of an OHT Hand Unit—interface between the OHT vehicle and the FOUP. However, since the OHT vehicle and the FOUP keep traveling, the target system is floating and there exists no external anchoring point for a controlling force source. In addition, no sensor attachments are permitted on mass-production FOUPs, which makes this vibration level suppression problem more challenging. In this research, a custom testbed is designed to replicate the acceleration profile of the OHT vehicle under its travel motion. Then, system modeling and identification is conducted using simulation and experiment to verify the fabricated testbed design. Finally, a Disturbance Observer-Based Controller (DOBC) is developed and implemented on a custom active vibration suppression actuator with inertia force-based counterbalancing to reduce peak vibration amplitude from 870 µm to 230 µm.
2022
6.
Chen Yang*; Fangzhou Xia; Yi Wang; Kamal Youcef-Toumi
Comprehensive study of charge-based motion control for piezoelectric nanopositioners: Modeling, instrumentation and controller design Journal Article
In: Mechanical Systems and Signal Processing, vol. 166, pp. 108477, 2022, ISSN: 0888-3270.
Abstract | Links | BibTeX | Tags: Actuator, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Piezoelectricity, Theory
@article{2021_MSSP,
title = {Comprehensive study of charge-based motion control for piezoelectric nanopositioners: Modeling, instrumentation and controller design},
author = {Chen Yang* and Fangzhou Xia and Yi Wang and Kamal Youcef-Toumi},
url = {https://www.sciencedirect.com/science/article/pii/S0888327021008219},
doi = {https://doi.org/10.1016/j.ymssp.2021.108477},
issn = {0888-3270},
year = {2022},
date = {2022-01-01},
urldate = {2022-01-01},
journal = {Mechanical Systems and Signal Processing},
volume = {166},
pages = {108477},
abstract = {High performance motion control of piezoelectric nanopositioners is crucial for a wide range of applications. The primary challenges stem from several aspects, including hysteresis and creep effects, along with the lightly damped mechanical resonance. In view of these issues, this paper proposes a comprehensive charge-based motion control solution, including a generalized electromechanical model, a charge controller with non-resistive DC stabilization and a robust charge control (RCC) strategy. The advantages of charge-based control in system identification and controller design are clearly indicated. Towards this solution, a generalized model of piezoelectric nanopositioner is first proposed, showing the effectiveness of charge control approach in the presence of arbitrarily complicated mechanical dynamics. Furthermore, we present a charge controller with a simple configuration, which eliminates the frequency-dependent performance of classical controller design. This guarantees consistently high control performance over the full operating bandwidth. Finally, to deal with the mechanical resonance and remaining nonlinearities and uncertainties, we propose a control strategy that combines charge control and robust feedback control into a single framework. Superior tracking and damping control performance of the proposed solution is confirmed by extensive experimental validations.},
keywords = {Actuator, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Piezoelectricity, Theory},
pubstate = {published},
tppubtype = {article}
}
High performance motion control of piezoelectric nanopositioners is crucial for a wide range of applications. The primary challenges stem from several aspects, including hysteresis and creep effects, along with the lightly damped mechanical resonance. In view of these issues, this paper proposes a comprehensive charge-based motion control solution, including a generalized electromechanical model, a charge controller with non-resistive DC stabilization and a robust charge control (RCC) strategy. The advantages of charge-based control in system identification and controller design are clearly indicated. Towards this solution, a generalized model of piezoelectric nanopositioner is first proposed, showing the effectiveness of charge control approach in the presence of arbitrarily complicated mechanical dynamics. Furthermore, we present a charge controller with a simple configuration, which eliminates the frequency-dependent performance of classical controller design. This guarantees consistently high control performance over the full operating bandwidth. Finally, to deal with the mechanical resonance and remaining nonlinearities and uncertainties, we propose a control strategy that combines charge control and robust feedback control into a single framework. Superior tracking and damping control performance of the proposed solution is confirmed by extensive experimental validations.
5.
Fangzhou Xia*; Morgan P Mayborne; Qiong Ma; Kamal Youcef-Toumi
Physical Intelligence in the Metaverse: Mixed Reality Scale Models for Twistronics and Atomic Force Microscopy Proceedings Article
In: 2022 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), pp. 1722-1729, 2022.
Abstract | Links | BibTeX | Tags: Actuator, Atomic Force Microscopy, Design, Education, Experimentation, Instrumentation, Intelligence, Material Science, Mechatronics, MEMS, Modeling & Simulation, Nanorobotics, Sensor
@inproceedings{2022IEEEAIM,
title = {Physical Intelligence in the Metaverse: Mixed Reality Scale Models for Twistronics and Atomic Force Microscopy},
author = {Fangzhou Xia* and Morgan P Mayborne and Qiong Ma and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/document/9863383},
doi = {10.1109/AIM52237.2022.9863383},
year = {2022},
date = {2022-01-01},
urldate = {2022-01-01},
booktitle = {2022 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)},
pages = {1722-1729},
abstract = {Physical intelligence (PI) is an emerging research field using new multi-functional smart materials in mechatronic designs. On the microscopic scale, PI principles give rise to unconventional transducers, which are especially useful for micro/nano-robot design with size and resource constrains. Since it is not easy to directly observe nanoscale multi-physics phenomenon, understanding their principles can be challenging. In this work, we bring PI principles into the metaverse to bridge this gap by developing two mixed reality scale models. The first example is a virtual reality (VR) 2D material twistronics visualizer to demonstrate the novel intelligent 2D materials with tunable properties as a rising field in condensed matter physics. Users can interactively control the cross-coupling multi-physics phenomena and observe the visualized material responses. The second example is centered around an Atomic Force Microscope (AFM) to illustrate its imaging and probe principles. For interaction, users can control the twist angle using atomic lattice models and feel the AFM cantilever force using custom haptic devices. We believe these tools can help precision mechatronic engineers understand and make better use of physical intelligence building blocks to design micro-electromechanical systems.},
keywords = {Actuator, Atomic Force Microscopy, Design, Education, Experimentation, Instrumentation, Intelligence, Material Science, Mechatronics, MEMS, Modeling & Simulation, Nanorobotics, Sensor},
pubstate = {published},
tppubtype = {inproceedings}
}
Physical intelligence (PI) is an emerging research field using new multi-functional smart materials in mechatronic designs. On the microscopic scale, PI principles give rise to unconventional transducers, which are especially useful for micro/nano-robot design with size and resource constrains. Since it is not easy to directly observe nanoscale multi-physics phenomenon, understanding their principles can be challenging. In this work, we bring PI principles into the metaverse to bridge this gap by developing two mixed reality scale models. The first example is a virtual reality (VR) 2D material twistronics visualizer to demonstrate the novel intelligent 2D materials with tunable properties as a rising field in condensed matter physics. Users can interactively control the cross-coupling multi-physics phenomena and observe the visualized material responses. The second example is centered around an Atomic Force Microscope (AFM) to illustrate its imaging and probe principles. For interaction, users can control the twist angle using atomic lattice models and feel the AFM cantilever force using custom haptic devices. We believe these tools can help precision mechatronic engineers understand and make better use of physical intelligence building blocks to design micro-electromechanical systems.
2021
4.
Chen Yang*; Nicolas Verbeek; Fangzhou Xia; Yi Wang; Kamal Youcef-Toumi
Modeling and Control of Piezoelectric Hysteresis: A Polynomial-Based Fractional Order Disturbance Compensation Approach Journal Article
In: IEEE Transactions on Industrial Electronics, vol. 68, no. 4, pp. 3348-3358, 2021.
Abstract | Links | BibTeX | Tags: Actuator, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Piezoelectricity, Theory
@article{2020IEEETIE,
title = {Modeling and Control of Piezoelectric Hysteresis: A Polynomial-Based Fractional Order Disturbance Compensation Approach},
author = {Chen Yang* and Nicolas Verbeek and Fangzhou Xia and Yi Wang and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/document/9027124},
year = {2021},
date = {2021-01-01},
urldate = {2021-01-01},
journal = {IEEE Transactions on Industrial Electronics},
volume = {68},
number = {4},
pages = {3348-3358},
publisher = {IEEE},
abstract = {Piezoelectric hysteresis is a critical issue that significantly degrades the motion accuracy of piezo-actuated nanopositioners. Such an issue is difficult to be precisely modeled and compensated for, primarily due to its asymmetric, rate, and input amplitude-dependent characteristics. This article proposes a novel method to deal with this challenge. Specifically, a polynomial-based fractional order disturbance model is proposed to accommodate and characterize the complex hysteresis effect. In this model, the rate dependence is captured by a general method of implementing curve fitting in Bode magnitude plot. The inverse model for control purposes is immediately available from the original one. The proposed method does not require expensive computational resources. In fact, this article shows that this controller can be easily implemented in an analog manner, which brings the advantages of high bandwidth and low cost. Extensive modeling and tracking experiments are carried out to demonstrate the effectiveness of the proposed method. It is shown that the piezoelectric hysteresis nonlinearity can be significantly suppressed over a wide bandwidth.},
keywords = {Actuator, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Piezoelectricity, Theory},
pubstate = {published},
tppubtype = {article}
}
Piezoelectric hysteresis is a critical issue that significantly degrades the motion accuracy of piezo-actuated nanopositioners. Such an issue is difficult to be precisely modeled and compensated for, primarily due to its asymmetric, rate, and input amplitude-dependent characteristics. This article proposes a novel method to deal with this challenge. Specifically, a polynomial-based fractional order disturbance model is proposed to accommodate and characterize the complex hysteresis effect. In this model, the rate dependence is captured by a general method of implementing curve fitting in Bode magnitude plot. The inverse model for control purposes is immediately available from the original one. The proposed method does not require expensive computational resources. In fact, this article shows that this controller can be easily implemented in an analog manner, which brings the advantages of high bandwidth and low cost. Extensive modeling and tracking experiments are carried out to demonstrate the effectiveness of the proposed method. It is shown that the piezoelectric hysteresis nonlinearity can be significantly suppressed over a wide bandwidth.
3.
Chen Yang*; Nicolas Verbeek; Fangzhou Xia; Yi Wang; Kamal Youcef-Toumi
Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning Journal Article
In: IEEE Transactions on Industrial Electronics, vol. 68, no. 9, pp. 8550-8560, 2021.
Abstract | Links | BibTeX | Tags: Actuator, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Piezoelectricity, Theory
@article{2020IEEETIE_2,
title = {Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning},
author = {Chen Yang* and Nicolas Verbeek and Fangzhou Xia and Yi Wang and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/abstract/document/9177358},
year = {2021},
date = {2021-01-01},
urldate = {2021-01-01},
journal = {IEEE Transactions on Industrial Electronics},
volume = {68},
number = {9},
pages = {8550-8560},
publisher = {IEEE},
abstract = {Piezoelectric self-sensing is a promising displacement estimation technique that has captured a broad range of attention since its origin. However, one long-standing and critical issue associated with this technique is its unstable static performance. This issue significantly undermines the sensing accuracy and the long-term reliability, which are primary concerns in industrial applications. In this article, we show that this challenging issue can be finally solved. The proposed solution consists of two steps. First, we develop a novel charge sensing circuit that provides an explicit access to observe any disturbance that might impact the static sensing. Second, by introducing cascaded observers, a self-improvement sensing scheme is developed. High accuracy displacement estimate can, thus, be reconstructed by fusing the reference signal, the observed disturbance, and the original sensing signal together. Experimental validations demonstrate the expected stable performance. The root-mean-square sensing errors are well below 1%. The developed self-sensing technique is a competitive solution for nanopositioning applications, also due to its self-contained, immunity to environmental disturbance, and plug-and-play features.},
keywords = {Actuator, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control, Piezoelectricity, Theory},
pubstate = {published},
tppubtype = {article}
}
Piezoelectric self-sensing is a promising displacement estimation technique that has captured a broad range of attention since its origin. However, one long-standing and critical issue associated with this technique is its unstable static performance. This issue significantly undermines the sensing accuracy and the long-term reliability, which are primary concerns in industrial applications. In this article, we show that this challenging issue can be finally solved. The proposed solution consists of two steps. First, we develop a novel charge sensing circuit that provides an explicit access to observe any disturbance that might impact the static sensing. Second, by introducing cascaded observers, a self-improvement sensing scheme is developed. High accuracy displacement estimate can, thus, be reconstructed by fusing the reference signal, the observed disturbance, and the original sensing signal together. Experimental validations demonstrate the expected stable performance. The root-mean-square sensing errors are well below 1%. The developed self-sensing technique is a competitive solution for nanopositioning applications, also due to its self-contained, immunity to environmental disturbance, and plug-and-play features.
2019
2.
Chen Yang*; Fangzhou Xia; Yi Wang; Stephen Truncale; Kamal Youcef-Toumi
Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked Structure Proceedings Article
In: IEEE American Control Conference (ACC), pp. 3782-3788, 2019.
Abstract | Links | BibTeX | Tags: Actuator, Atomic Force Microscopy, Design, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control
@inproceedings{2019ACC_2,
title = {Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked Structure},
author = {Chen Yang* and Fangzhou Xia and Yi Wang and Stephen Truncale and Kamal Youcef-Toumi},
url = {https://ieeexplore.ieee.org/document/8815299},
year = {2019},
date = {2019-01-01},
urldate = {2019-01-01},
booktitle = {IEEE American Control Conference (ACC)},
pages = {3782-3788},
abstract = {A novel multi-actuated nanopositioning stage with stacked structure has been developed. The aim is to achieve both high bandwidth and large motion range. Symmetric flexures are designed to obtain equal stiffness along any direction in the lateral plane. With this design, the lateral stiffness and corresponding bending mode resonance frequency can be optimized. Both analytical model and finite element analysis are employed to predict the dominant resonance frequency. Experimental results indicate that the dominant resonance of nanopositioner is at 28.2 kHz, with a motion range of 16.5J.1m. A disturbance-observer-based controller is implemented to suppress the hysteretic nonlinearity. The new design and control system enable high-bandwidth and high-precision nanopositioning up to 2 kHz.},
keywords = {Actuator, Atomic Force Microscopy, Design, Experimentation, Instrumentation, Mechatronics, Modeling & Simulation, Motion Control},
pubstate = {published},
tppubtype = {inproceedings}
}
A novel multi-actuated nanopositioning stage with stacked structure has been developed. The aim is to achieve both high bandwidth and large motion range. Symmetric flexures are designed to obtain equal stiffness along any direction in the lateral plane. With this design, the lateral stiffness and corresponding bending mode resonance frequency can be optimized. Both analytical model and finite element analysis are employed to predict the dominant resonance frequency. Experimental results indicate that the dominant resonance of nanopositioner is at 28.2 kHz, with a motion range of 16.5J.1m. A disturbance-observer-based controller is implemented to suppress the hysteretic nonlinearity. The new design and control system enable high-bandwidth and high-precision nanopositioning up to 2 kHz.
2017
1.
Ivo W Rangelow*; Tzvetan Ivanov; Ahmad Ahmad; Marcus Kaestner; Claudia Lenk; Iman S Bozchalooi; Fangzhou Xia*; Kamal Youcef-Toumi; Mathias Holz; Alexander Reum
Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication Journal Article
In: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 35, no. 6, pp. 06G101, 2017.
Abstract | Links | BibTeX | Tags: Actuator, Atomic Force Microscopy, Instrumentation, MEMS, Nanorobotics, Review, Sensor
@article{2017JVST,
title = {Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication},
author = {Ivo W Rangelow* and Tzvetan Ivanov and Ahmad Ahmad and Marcus Kaestner and Claudia Lenk and Iman S Bozchalooi and Fangzhou Xia* and Kamal Youcef-Toumi and Mathias Holz and Alexander Reum},
url = {https://avs.scitation.org/doi/10.1116/1.4992073},
year = {2017},
date = {2017-01-01},
urldate = {2017-01-01},
journal = {Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},
volume = {35},
number = {6},
pages = {06G101},
publisher = {AVS},
abstract = {With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes.},
keywords = {Actuator, Atomic Force Microscopy, Instrumentation, MEMS, Nanorobotics, Review, Sensor},
pubstate = {published},
tppubtype = {article}
}
With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes.
Dr. Fangzhou Xia
Research Scientist
Mechanical Engineering Department
Physics Department
Massachusetts Institute of Technology